Harland G. (Motorola, Inc.) Tompkins,
William A. (Nanometrics, Inc.) McGahan
John Wiley & Sons Inc
e druk, 1999
9780471181729
Spectroscopic Ellipsometry and Reflectometry
A User's Guide
Specificaties
Gebonden, 248 blz.
|
EN
John Wiley & Sons Inc |
1999
ISBN13: 9780471181729
Rubricering
Levertijd ongeveer 16 werkdagen
Gratis verzonden
Samenvatting
While single wave ellipsometry has been around for years, spectroscopic ellipsometry is fast becoming the method of choice for measuring the thickness and optical properties of thin films. This book provides the first practical introduction to spectroscopic ellipsometry and the related techniques of reflectometry.
Specificaties
ISBN13:9780471181729
Taal:EN
Bindwijze:Gebonden
Aantal pagina's:248
Uitgever:John Wiley & Sons Inc