Jarek Dabrowski,
Eicke R. Weber
Springer Berlin Heidelberg
0e druk, 2010
9783642058042
Predictive Simulation of Semiconductor Processing
Status and Challenges
Specificaties
Paperback, 490 blz.
|
Engels
Springer Berlin Heidelberg |
2010
ISBN13: 9783642058042
Rubricering
Onderdeel van serie
Springer Series in Materials Science
Levertijd ongeveer 9 werkdagen
Gratis verzonden
Samenvatting
Predictive Simulation of Semiconductor Processing enables researchers and developers to extend the scaling range of semiconductor devices beyond the parameter range of empirical research. It requires a thorough understanding of the basic mechanisms employed in device fabrication, such as diffusion, ion implantation, epitaxy, defect formation and annealing, and contamination. This book presents an in-depth discussion of our current understanding of key processes and identifies areas that require further work in order to achieve the goal of a comprehensive, predictive process simulation tool.
Specificaties
ISBN13:9783642058042
Taal:Engels
Bindwijze:paperback
Aantal pagina's:490
Uitgever:Springer Berlin Heidelberg
Druk:0
Inhoudsopgave
1 Transistors and Atoms.- 2 Atomistic Simulations of Processes at Surfaces.- 3 Atomistic Simulations in Materials Processing.- 4 Atomistic Simulation of Decanano MOSFETs.- 5 Modeling and Simulation of Heterojunction Bipolar Transistors.- 6 Gate Oxide Reliability: Physical and Computational Models.- 7 High-K Dielectrics: The Example of Pr2O3.- 8 Atomistic Simulation of Si3N4 CVD from Dichlorosilane and NH3.- 9 Interconnects and Propagation of High Frequency Signals.- 10 Modeling of Electromigration in Interconnects.- 11 Predictive Modeling of Transition Metal Gettering: Applications and Materials Science Challenges.