1. Introduction.- 1.1 Electron Spectroscopy and Its Importance in Surface Science.- 1.2 The Information Depth.- 1.3 Electron Spectroscopies.- References.- 2. Design of Electron Spectrometers for Surface Analysis.- 2.1 Specific Requirements of the Various Electron Spectroscopies for Surface Analysis.- 2.2 General Principles and Characteristics of Electron Spectrometers.- 2.2.1. Basic Principles of Energy Analysis.- 2.2.2. Characteristics Related to Energy Resolution and Sensitivity.- 2.2.3. Figures of Merit.- 2.3 Design Principles of Electron Spectrometers.- 2.3.1 Electron Optics for Energy Analysis.- 2.3.2 Optimization of Electron Monochromators and Analyzers.- 2.3.3 Detection Methods and Data Processing.- 2.3.4 Further Practical Considerations.- 2.4 Description of the Electron Spectrometers and the Methods of Energy Analysis for Surface Studies.- 2.4.1 Electrostatic Deflection Spectrometers.- 2.4.2 Magnetic Deflection Spectrometers.- 2.4.3 Crossed-Field Deflection Spectrometers.- 2.4.4 Retarding Potential Spectrometers.- 2.4.5 Other Techniques.- 2.5 Comparison of Electron Spectrometers.- 2.6 List of Abbreviations and Acronyms.- References.- 3. Electron-Excited Core Level Spectroscopies.- 3.1 Basic Processes.- 3.1.1 Free Atoms.- 3.1.2 Surface Atoms.- 3.2 Threshold Spectroscopies.- 3.2.1 Oberserving the Excitation: Disappearance Potential Spectroscopy (DAPS).- 3.2.2 Observing the Deexcitation.- 3.3 Ionization Loss Spectroscopy (ILS).- 3.4 Auger Electron Spectroscopy (AES).- 3.4.1 Influence of the Atomic Environment.- 3.4.2 Quantitative Auger Analysis.- 3.4.3 Auger Microanalysis.- 3.4.4 Combined Auger/X-Ray Microanalysis.- 3.5 Comparisons.- 3.5.1 Threshold Spectroscopies Inter Se.- 3.5.2 Threshold Spectroscopies Versus ILS.- 3.5.3 Elemental Analysis.- References.- 4. Electron Diffraction and Surface Defect Structure.- 4.1 Principles of Defect Detection by Electron Diffraction.- 4.1.1 Validity of the Kinematical Approximation.- 4.1.2 Construction and Calculation of the Ideal LEED Pattern.- 4.1.3 Instrumental Limitations.- 4.1.4 Diffraction Pattern of Simple Defect Structures.- 4.1.5 The Kind of Information in the Diffraction Pattern.- 4.2 Point Defects.- 4.2.1 Variation of Scattering Factor.- 4.2.2 Variation of Atom Position.- 4.3 Atomic Steps.- 4.3.1 Regular Step Arrays on Primitive Lattices.- 4.3.2 Irregular Step Arrays.- 4.3.3 Nonprimitive Lattices.- 4.3.4 Examples of Stepped Surfaces.- 4.4 Domains and Facets.- 4.4.1 Superstructures and Domains.- 4.4.2 LEED Patterns of Domain Structures.- 4.4.3 Quantitative Description of LEED Patterns.- 4.4.4 Facets.- 4.5 The Interpretation of a LEED Pattern.- 4.5.1 Parameters to be Observed.- 4.5.2 Interrelation of Defects and Effects.- References.- 5. Photoemission Spectroscopy.- 5.1 Principles of Photoemission.- 5.1.1 Parameters and Ranges.- 5.1.2 Basic Processes.- 5.2 Instrumentation.- 5.2.1 Light Sources.- 5.3 Theoretical and Practical Aspects.- 5.3.1 Electron Excitation and Emission.- 5.3.2 Surface Sensitivity.- 5.3.3 Relaxation and Chemical Shift.- 5.3.4 Photoemission from Adsorbates.- 5.4 Measurement Methods.- 5.4.1 Energy-Resolved Spectroscopy.- 5.4.2 Angle-Resolved Photoemission.- 5.4.3 Yield Spectroscopies.- 5.4.4 Spin-Polarized Photoemission.- References.- 6. Electron Energy Loss Spectroscopy.- 6.1 Definition of ELS.- 6.2 Theory of Inelastic Scattering.- 6.2.1 The Classical Theory (Concept of the “Dielectric Theory”).- 6.2.2 Quantum Mechanical Description of the Dielectric Theory.- 6.2.3 The Excitation of Optical Surface Phonons in Infrared-Active Material.- 6.2.4 Excitation of Optical Surface Phonoms on Noninfrared-Active Substrates.- 6.2.5 Excitation of Plasma Waves.- 6.2.6 Electronic Surface Transitions.- 6.2.7 Data Reduction.- 6.2.8 Anisotropic Effects of ELS.- 6.3 Experimental Studies of Surface Vibrations (Clean Surfaces).- 6.3.1 The Apparatus.- 6.3.2 Infrared Active Material.- 6.3.3 Noninfrared Active Material.- 6.4 Vibrational Modes on Gas-Covered Surfaces.- 6.4.1 Apparatus.- 6.4.2 Information.- 6.4.3 Oxygen Adsorption on Si (111) 2 × 1.- 6.4.4 Adsorption of Hydrogen on Si (111) 2 × 1.- 6.4.5 Hydrogen Adsorption on W(100).- 6.4.6 Adsorption of Oxygen on W(100).- 6.4.7 The Adsorption of CO on Tungsten (100).- 6.5 Experimental Studies of Electronic Transitions.- 6.5.1 The Apparatus.- 6.5.2 Relationship Between the Spectrometer and the Interpretation of the Loss Spectra.- 6.5.3 Excitations of Electronic Transitions at Clean Silicon Surfaces.- 6.5.4 Electronic Excitations at Ge(111) Surfaces.- 6.5.5 Galliurn Arsenide.- 6.5.6 Selection Rule Effects Observed at Ge and GaAs.- 6.5.7 Electronic Transitions at SiO and SiO2.- 6.6 Conclusion.- References.